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Name of Product |
purity |
specifications |
Applicable model number |
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Al |
4N,5N,6N |
≠0.5×100×100 ≠6×Φ80 |
Varian TM , MRC TM , |
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AlSi |
4N |
≠ 1×120×120 ≠6×Φ100 |
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Cu |
4N,5N,6N |
≠ 1.03×200×300 ≠6×Φ154 |
ANELVA TM , ULVAC TM |
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Ni |
4N,5N |
≠2×Φ5 ≠6.35×76.2×431.8 |
Oerlikon (Balzer)
TM , |
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Cr |
4N,5N |
≠3×Φ100 ≠6.35×Φ101.6 |
AMAT TM , Novellus TM , |
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NiCr |
4N |
≠3×76.2 |
≠6×126×178 |
etc |
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Ta |
4N |
≠3×79.5×424 ≠6.35×76.2×431.8 |
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Ti |
4N |
≠3×Φ100 ≠6.35×79.4×423 |
Other configurations |
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WTi |
4N |
≠4×79.5×424 ≠6.35×Φ101.6 |
available acc. to |
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Sn SnAgCu Zn ZnV ZnLi |
4N,5N 4N 4N,5N 4N 4N |
≠4×Φ101.6 ≠4×Φ152.4 ≠5×Φ76.2 ≠5×Φ89.5 ≠5×Φ92 ≠5×Φ150×Φ100 |
≠6.35×Φ203.2 ≠6.4×Φ107.5 ≠6.5×76×431.6 ≠6.5×Φ107.5 ≠6.5×Φ220 ≠ 8×Φ228 |
customer’s specs. |
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≠5×Φ203 |
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