|
Name of Product purity |
specifications |
Applicable model number |
|
|
Au |
4N,
5N |
≠ 1×Φ76×Φ50 ≠3.2×76×431.6 ≠5×Φ100 |
Varian TM , MRC TM , KDF TM, |
|
AuAs |
4N |
≠2×130×150 ≠3.3×127×381 ≠5×Φ150×Φ100 |
ANELVA TM , ULVAC TM |
|
AuGeNi 4N |
≠3×Φ30 ≠3.3×79.5×424 ≠5×Φ203 |
Oerlikon (Balzer)
TM , |
|
|
Pd |
3N5,4N |
≠3×Φ50 ≠3.5×79.5×424 ≠5×Φ89.5 |
AMAT TM , Novellus TM , etc |
|
Pt |
3N5,4N |
≠3×Φ60 ≠4×Φ76.2 ≠6×Φ76 |
|
|
Ag |
4N,
5N |
≠3×Φ80 ≠4×Φ88 ≠6×Φ101.6 |
Other configurations available |
|
AgCu |
4N |
≠3×Φ100
≠4.4×Φ101.6 ≠6×126×304 |
acc. to customer’s specs. |
|
|
≠3×Φ150 ≠5×103×183 ≠6×126.5×405.9 |
|
|
|
|
≠3×100×122
≠5×76.2×400 |
|
|
|
|
≠3.2×Φ101 ≠5×Φ52 |
|
|
