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Anhui Dahui Electronics Co., LTD

地   址:Room 613, Building A3, Phase I, Zhongan Chuanggu Science Park, No. 900, Wangjiang West Road, High-tech Zone, Hefei City, Anhui Province

联系人:王杰

电   话:15922443913

微   信:JK939538850

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Sputtering target (precious metal)
  

Name of Product                      purity

specifications

Applicable model number

Au

4N, 5N

≠ 1×Φ76×Φ50      ≠3.2×76×431.6      ≠5×Φ100

Varian TM , MRC TM , KDF TM,

AuAs

4N

≠2×130×150        ≠3.3×127×381       ≠5×Φ150×Φ100

ANELVA TM , ULVAC TM

AuGeNi        4N

≠3×Φ30                ≠3.3×79.5×424      ≠5×Φ203

Oerlikon (Balzer) TM ,

Pd

3N5,4N

≠3×Φ50                ≠3.5×79.5×424      ≠5×Φ89.5

AMAT TM , Novellus TM , etc

Pt

3N5,4N

≠3×Φ60                 ≠4×Φ76.2               ≠6×Φ76

 

Ag

4N, 5N

≠3×Φ80                 ≠4×Φ88                  ≠6×Φ101.6

Other configurations  available

AgCu

4N

3×Φ100               ≠4.4×Φ101.6          ≠6×126×304

acc. to customers specs.

 

≠3×Φ150                ≠5×103×183            ≠6×126.5×405.9

 

 

≠3×100×122        ≠5×76.2×400

 

 

≠3.2×Φ101           ≠5×Φ52

 

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