The KY-R-LQC400-6M CVD furnace is a special high vacuum CVD system, which is an ideal equipment for universities, research institutes, and industrial and mining enterprises to conduct high-temperature atmosphere sintering, atmosphere reduction, CVD experiments, and vacuum annealing. The equipment adopts a double-layer shell structure with partial cooling, so that the surface temperature of the shell is less than 55 ° C. The use of high-purity alumina polycrystalline fibers as insulation materials can be environmentally friendly, energy-saving, and reduce heat loss. Simultaneously adopting a lightweight furnace, it has high thermal efficiency, low energy consumption, and good temperature uniformity inside the furnace, which can extend the efficiency of equipment use
KY-R-LQC400-6M CVD Furnace Product Features
The furnace has excellent sealing performance and can be filled with mixed gases such as nitrogen, acetylene, methane, acetone, etc
Combined feeding method, precise control of feeding amount Configure electronic flow meters and peristaltic pumps; Automatic control of temperature, pressure, and flow inside the furnace Lightweight furnace, high thermal efficiency, low energy consumption, and good temperature uniformity inside the furnace The PLC fully automatically controls the entire process, and the operation is simple and intuitive through the touch screen Stable operation, suitable for maintenance, and equipment size can be customized according to non-standard requirements Technical parameters of KY-R-LQC series continuous CVD furnace相关标签：