The vapor deposition furnace is an advanced material preparation technology that plays an important role in material research and preparation. In order to ensure its safety, stability, and accuracy, regular maintenance is required.
Firstly, the temperature and control system should be checked regularly.
The vapor deposition furnace has a complete temperature control system, including temperature sensors, temperature controllers, heating modules, and heat regulating actuators.
. During regular maintenance, it is necessary to check whether the temperature sensor is working properly, whether the temperature controller can adjust the temperature range, whether the heating module and heat regulating actuator can correctly respond to control signals, and whether the controller control accuracy can meet the requirements2. Regularly inspect the structure
In addition to regularly inspecting the temperature and control system, it is also necessary to regularly inspect the internal structure of the gas deposition furnace, including the furnace chamber, burner, furnace seat, support feet, and external packaging structure for damage.
. If damage is found to the internal structure of the furnace, it should be promptly inspected and repaired3. Regularly check the gas filtration system
During maintenance and repair, it is also necessary to regularly check the gas filtration system, including the filter, gas cleanliness, and whether the gas cylinder is leaking.
. If any air leakage is found, the gas filtration system should be replaced in a timely manner 4. Regular inspection of the feeding system of the vapor deposition furnace, including the feeding port, hopper, conveyor, and throwing shaft, is necessary to ensure good operation. During the inspection, the operating status of the conveyor should be checked, including whether the motor is powered, and whether there is damage to the feeding port, hopper, and throwing shaft5. Regularly check the security system
The security system is an important guarantee for the safety of the vapor deposition furnace. Therefore, during maintenance, it is also necessary to regularly check the security system to ensure safety.
. Key inspections should include video surveillance, access control systems, alarm systems, etc., and ensure that they can function properly The above is an introduction to how to carry out daily maintenance for gas deposition furnaces. Gas deposition furnaces play an important role in materials, so regular daily maintenance is necessary to ensure safety, stability, and accuracy