With the development of technology, the traditional method of preparing refractory metals has a higher cost. If gas is introduced into the room in a vapor deposition furnace, chemical reactions will occur on the surface of the indoor substrate, which has new requirements for the chemical deposition furnace. The gas deposition furnace technology can also be applied in lithium electronic battery materials. With the advantages of easy reproduction and coverage of the gas deposition furnace itself, the following are the uses of the gas deposition furnace:
1 The main body of the vapor deposition furnace is equipped with a heating chamber, water-cooled electrodes, and temperature measuring thermocouples, which are the core parts for processing workpieces
2. It is a gas mixing tank, consisting of 1 electric butterfly valve, 2 float flow meters, and 4 stainless steel manual stop valves. It is responsible for the mixing ratio of argon and propane, as well as the quantitative transportation of working gas to the sedimentation furnace 3. Two slide valve pumps are responsible for the removal of air and exhaust gas from the furnace, ensuring that the furnace operates within a constant pressure range 4. Two filter tanks are responsible for removing dust from the front stage of the slide valve pump 5. Two vacuum electric butterfly valves can adjust the pump's pumping speed by adjusting the valve opening during the operation of the slide valve pump