Xianyang Ceramic Research Institute has been engaged in the research and development and production of vapor deposition furnaces for many years. Our company's chemical vapor deposition furnaces are mainly used for producing hydrocarbon gases (such as C3H8 CH4) CVD/CVI treatment of the surface or substrate of the carbon source material
The characteristics of this vapor deposition furnace:
The control technology used in the chemical vapor deposition furnace can precisely control the gas flow and pressure, stabilize the deposition airflow in the furnace, and have a small range of pressure fluctuations.
At the same time, a special structure sedimentation chamber is used, which has good sealing effect and strong anti pollution ability Adopting multi-channel deposition gas path, the flow field is uniform, without sedimentation dead corners, and the deposition effect is good Effectively treat highly corrosive exhaust gas, flammable and explosive gases, solid dust, and low melting point viscous products generated by sedimentation The vapor deposition furnace adopts a corrosion-resistant vacuum unit design, which has a long continuous working time, high production efficiency, and low maintenance rate